Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications

Chantal M. Silvestre; Jens H. Hemmingsen; Erik S. Dreier; Jan Kehres; Ole Hansen

doi:10.1016/j.mee.2019.03.007

Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications

Chantal M. Silvestre, Jens H. Hemmingsen, Erik S. Dreier, Jan Kehres, Ole Hansen

X-ray and Neutron Science

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

4 Citationer (Scopus)

Originalsprog	Engelsk
Tidsskrift	Microelectronic Engineering
Vol/bind	209
Sider (fra-til)	60-65
ISSN	0167-9317
DOI	https://doi.org/10.1016/j.mee.2019.03.007
Status	Udgivet - 15 mar. 2019

Adgang til dokumentet

10.1016/j.mee.2019.03.007

Citationsformater

@article{f3fc8a3c8b464cd9995d55e9e55e58e0,

title = "Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications",

keywords = "High aspect ratio gratings, Laser ablation, Medical imaging, Phase-contrast imaging, Tungsten gratings, X-ray optics",

author = "Silvestre, {Chantal M.} and Hemmingsen, {Jens H.} and Dreier, {Erik S.} and Jan Kehres and Ole Hansen",

year = "2019",

month = mar,

day = "15",

doi = "10.1016/j.mee.2019.03.007",

language = "English",

volume = "209",

pages = "60--65",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Laser ablation of high-aspect-ratio hole arrays in tungsten for X-ray applications

AU - Silvestre, Chantal M.

AU - Hemmingsen, Jens H.

AU - Dreier, Erik S.

AU - Kehres, Jan

AU - Hansen, Ole

PY - 2019/3/15

Y1 - 2019/3/15

KW - High aspect ratio gratings

KW - Laser ablation

KW - Medical imaging

KW - Phase-contrast imaging

KW - Tungsten gratings

KW - X-ray optics

U2 - 10.1016/j.mee.2019.03.007

DO - 10.1016/j.mee.2019.03.007

M3 - Journal article

SN - 0167-9317

VL - 209

SP - 60

EP - 65

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -