Spatial characterization of nanotextured surfaces by visual color imaging

Nikolaj  Agentoft Feidenhans'l; Swathi Murthy

Spatial characterization of nanotextured surfaces by visual color imaging

Nikolaj Agentoft Feidenhans'l, Swathi Murthy

Marine Biological Section

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

1 Citationer (Scopus)

Abstract

We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.

Originalsprog	Engelsk
Tidsskrift	Applied Optics
Vol/bind	55
Udgave nummer	34
ISSN	1559-128X
Status	Udgivet - 2016

Citationsformater

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abstract = "We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.",

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AU - Agentoft Feidenhans'l, Nikolaj

AU - Murthy, Swathi

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AB - We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.

M3 - Journal article

SN - 1559-128X

VL - 55

JO - Applied Optics

JF - Applied Optics

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