Two-dimensional nanometer scale calibration based on one-dimensional gratings

J. Garnæs, L. Nielsen, K. Dirscherl, J.F. Jørgensen, J.B. Rasmussen, P.E. Lindelof, C.B. Sørensen

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@article{4e19e1e074c511dbbee902004c4f4f50,

title = "Two-dimensional nanometer scale calibration based on one-dimensional gratings",

author = "J. Garn{\ae}s and L. Nielsen and K. Dirscherl and J.F. J{\o}rgensen and J.B. Rasmussen and P.E. Lindelof and C.B. S{\o}rensen",

year = "1998",

language = "English",

pages = "831",

journal = "Appl.Phys.A",

number = "66",

}