Membrane-Based Scanning Force Microscopy

David Halg; Thomas Gisler; Yeghishe Tsaturyan; Letizia Catalini; Urs Grob; Marc-Dominik Krass; Martin Heritier; Hinrich Mattiat; Ann-Katrin Thamm; Romana Schirhagl; Eric C. Langman; Albert Schliesser; Christian L. Degen; Alexander Eichler

doi:10.1103/PhysRevApplied.15.L021001

Membrane-Based Scanning Force Microscopy

David Halg, Thomas Gisler, Yeghishe Tsaturyan, Letizia Catalini, Urs Grob, Marc-Dominik Krass, Martin Heritier, Hinrich Mattiat, Ann-Katrin Thamm, Romana Schirhagl, Eric C. Langman, Albert Schliesser, Christian L. Degen, Alexander Eichler^*

^*Corresponding author for this work

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Abstract

We report the development of a scanning force microscope based on an ultrasensitive silicon nitride membrane optomechanical transducer. Our development is made possible by inverting the standard microscope geometry-in our instrument, the substrate is vibrating and the scanning tip is at rest. We present topography images of samples placed on the membrane surface. Our measurements demonstrate that the membrane retains an excellent force sensitivity when loaded with samples and in the presence of a scanning tip. We discuss the prospects and limitations of our instrument as a quantum-limited force sensor and imaging tool.

Original language	English
Article number	021001
Journal	Physical Review Applied
Volume	15
Issue number	2
Number of pages	6
ISSN	2331-7019
DOIs	https://doi.org/10.1103/PhysRevApplied.15.L021001
Publication status	Published - 5 Feb 2021

Bibliographical note

Hy-Q

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Membrane-Based Scanning Force Microscopy. / Halg, David; Gisler, Thomas; Tsaturyan, Yeghishe; Catalini, Letizia; Grob, Urs; Krass, Marc-Dominik; Heritier, Martin; Mattiat, Hinrich; Thamm, Ann-Katrin; Schirhagl, Romana; Langman, Eric C.; Schliesser, Albert; Degen, Christian L.; Eichler, Alexander.

In: Physical Review Applied, Vol. 15, No. 2, 021001, 05.02.2021.

Research output: Contribution to journal › Journal article › Research › peer-review

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AU - Grob, Urs

AU - Krass, Marc-Dominik

AU - Heritier, Martin

AU - Mattiat, Hinrich

AU - Thamm, Ann-Katrin

AU - Schirhagl, Romana

AU - Langman, Eric C.

AU - Schliesser, Albert

AU - Degen, Christian L.

AU - Eichler, Alexander

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AB - We report the development of a scanning force microscope based on an ultrasensitive silicon nitride membrane optomechanical transducer. Our development is made possible by inverting the standard microscope geometry-in our instrument, the substrate is vibrating and the scanning tip is at rest. We present topography images of samples placed on the membrane surface. Our measurements demonstrate that the membrane retains an excellent force sensitivity when loaded with samples and in the presence of a scanning tip. We discuss the prospects and limitations of our instrument as a quantum-limited force sensor and imaging tool.

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