Abstract
We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.
Original language | English |
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Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 7 |
Pages (from-to) | 1111 |
Number of pages | 3 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 1 Jan 2003 |
Externally published | Yes |