Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems

Torben M. Hansen, Kurt Stokbro, Ole Hansen, Tue Hassenkam, Ichiro Shiraki, Shuji Hasegawa, Peter Bøggild

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26 Citations (Scopus)

Abstract

A method for resolution enhancement of scanning four-point-probe measurements on two-dimensional systems was presented. The resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing by mapping the conductance on a dense grid around a target area and postprocessing the data. The results showed that the method can resolve the conductivity with submicron resolution.

Original languageEnglish
JournalReview of Scientific Instruments
Volume74
Issue number8
Pages (from-to)3701-3708
Number of pages8
ISSN0034-6748
DOIs
Publication statusPublished - 2003

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